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Thin-film Process Systems

Research & Development Systems
Bench Top Platform
Sierra Series (CVD platform)
Falcon Series
ALD Platform
Peregrine Series (Glovebox integrated)
Production Systems
HF Series (Hybrid Platform)
BC Series (Optical box coater)
MC Series (Metallizer)
Process Technology
Electron Beam Evaporation
Low Temperature Evaporation (LTE) with Effusion Cells
HT Glow Discharge
Magnetron Sputtering
Ion Beam Sputtering
Thermal Evaporation
Ion Beam
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