Performance Enhanced.
VACPRO Thin Film Deposition Systems offer a wide range of deposition options including RF/DC magnetron sputtering, thermal evaporation, Electron Beam Evaporation, Low-Temperature Evaporation (LTE) organic deposition, Chemical Vapour Deposition. These systems are available as stand-alone or as glove box integrated units. The system is fully integrated, performance tested and supported.
VACPRO VDS100
VACUUM DEPOSITION SYSTEMS
APPLICATIONS
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Fully integrated deposition system
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Supports RF/DC magnetron sputtering, thermal evaporation or LTE sources
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Multiple sources sequential or co-deposition modes
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Multiple process gas capability
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Supports up to 100mm x 100mm or 150mm diameter substrates or smaller
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Glovebox mating provisions provided
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High deposition rate & high efficiency cathode
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Simple and easy maintenance
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Wide configuration options & customizable to the application requirements
RESOURCES
VACPRO VDS500
VACUUM DEPOSITION SYSTEMS
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Fully integrated deposition system
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Supports electron beam evaporation, RF/DC magnetron sputtering, thermal evaporation or LTE sources
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Ion source substrate cleaning or assisted deposition
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Multiple sources sequential or co-deposition modes
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Multiple process gas capability
-
Supports up to 100mm x 100mm or 150mm diameter substrates or smaller
-
High deposition rate & high efficiency cathode
-
Simple and easy maintenance
-
Wide configuration options & customizable to the application requirements
APPLICATIONS
LABORATORY & CHEMISTRY
DOCUMENTATION